Special Issues/Surface Modification and Passivation of Materials by Ion Beams. Surface Modification and Ion Beam Technology.

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The growth and modification of materials via ion–surface processing

A wide variety of gas phase ions with kinetic energies from 1–10 eV increasingly are being used for the growth and modification of state-of-the-art material interfaces. Ions can be used to deposit thin films; expose fresh interfaces by sputtering; grow mixed interface layers from ions, ambient neutrals, and/or surface atoms; modify the phases of interfaces; dope trace elements into interface re...

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ژورنال

عنوان ژورنال: Journal of the Surface Finishing Society of Japan

سال: 1992

ISSN: 0915-1869,1884-3409

DOI: 10.4139/sfj.43.1097